Gas (AMC) Analyzers / AMC Monitoring Systems

Innospectra offers the Tiger Optics brand of Cavity Ring-Down Spectroscopy (CRDS) gas (AMC) analyzers & AMC Monitoring / sampling systems for the semiconductor industry Cavity Ring-Down Spectroscopy (CRDS) technology is a highly sensitive and precise analytical technique used for the detection and measurement of trace gases and isotopes in a sample. It is a non-destructive technique that provides quantitative measurements of molecular absorption spectra. The CRDS technology works by measuring the rate at which light is absorbed by a gas sample contained in a highly reflective cavity. A laser pulse is introduced into the cavity, and the light bounces back and forth between two highly reflective mirrors at the ends of the cavity. As the light bounces back and forth, it is absorbed by the gas sample in the cavity, causing a gradual decrease in the intensity of the light. The time it takes for the light to decay or “ring down” to a predetermined threshold level is measured, and this decay time provides information on the concentration of the gas species in the sample.

The offered analyzers are able to measure and monitor Ammonia (NH3), Hydrogen Chloride (HCL) and Hydrogen Fluoride (HF) . They come in single analyte configuration OR in a 3 in 1 analyzer that can measure all the 3 gases

Tiger Optics also offers the Go-Cart Mobile Solution for AMC Monitoring for single point measurement or the Multi Max Stationary Monitoring System that can monitor upto 40 locations (in multiples of 8 sampling ports) .