Picarro is a leading provider of trace gas analyzers for a wide variety of air monitoring applications.. Picarro’s patented Cavity Ring-Down Spectroscopy (CRDS) is at the heart of all Picarro instruments and solutions, enabling the detection of target molecules at part per billion, or better, resolution.
Innospectra offers the Picarro range of gas analyzers / AMC systems for Semiconductor applications – basically to detect HCL, NH3, HF & H2S gases.

Our represented range also includes AMC Fixed & Portable systems that come complete with 8 to 32 ports samplers for real time monitoring in the fab – basically for deposition, etching & cleaning operations, amongst others.

Our Range

SI2000 Series Analyzers (HCL, NH3, HF, H2S)

The Picarro SI2000 Series analyzers offer the power of highly sensitive laser spectroscopy for AMC cleanroom monitoring in a reliable, easy-to-use, compact design. These laser analyzers offer significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS) and ion chromatography. Both legacy techniques suffer the inadequacies of high costs of ownership, performance shortfalls and slow speeds of response. Using Cavity Ring Down Spectroscopy (CRDS), the analyser come complete with the following features / benefits / advantages :

  • Real-time AMC monitoring in cleanrooms, FOUP and FAB Equipment
  • Fast, continuous analysis in seconds
  • Accuracy, Precision and LDL (Low detection Limit) at PPT levels
  • Virtually no downtime or consumables cost
  • Factory conformance data packs with every analyzer
  • Extreme accuracy for event confirmation
  • Stability – No field calibration required (yearly site validation will do)
  • Available as part of a fixed or portable system with multi port sequencer or stand alone as a Point of Use (POU) analyser with a 7” display monitor

Available Models :

  • SI2108 : HCL Analyzer
  • SI2103 : NH3 Only Analyzer
  • SI2205 : HF Only Analyzer
  • SI2306 : NH3 & HF Analyzer
  • SI2104 : H2S Analyzer
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AMC Portable Leak Detection System

(For HF, HCl, NH3 and H2S analyzers)
The Picarro AMC Portable Leak Detection System utilizes one or two 8-port sequencer modules to mobilize Picarro gas analyzers for fast detection and confirmation of contamination events. The Portable System has been designed to optimize response time in the presence of reactive gases with the lowest memory retention in the valves, connectors, sample lines and sequencer components. The Sample Sequencer Module utilizes a SilcoNert- coated mass flow controller and a fast flow, high volume vacuum pump to quickly draw samples up to 50 meters away. Our robust and reliable components assure the best performing AMC Leak Detection System with our Picarro SI2000 Series analyzers.

Features / Benefits / Advantages include:

  • Simultaneous, continuous flush sequencer module provides very fast sample point scanning cycles
  • Optimized performance for Picarro SI2000 analyzers
  • Fully user-programmable leak search mode
  • Configurable for 8 or 16 sample ports
  • 1 hour backup Uninterruptible Power Supply
  • Recovery from PPM level leak events to normal cleanroom levels in just minutes
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Continuous Process Monitoring AMC System

(For HF, HCl, NH3 and H2S analyzers)
The Picarro AMC Process Monitoring System dramatically enhances the value of Picarro gas analyzers by expanding the area of coverage of our analyzers. The System has been designed to optimize response time in the presence of reactive gases with the lowest memory retention in the valves, connectors, sample lines and sequencer components. The Sample Sequencer Module utilizes a SilcoNert-coated mass flow controller and a fast flow, high volume vacuum pump to draw sample as far away as 200 meters. The robust sequencer design is ideal for fast switching between different stocker locations, and for covering large areas in the fab or sub-fab and plenum areas. These highly reliable components assure the best performing system for AMC Process Monitoring with our Picarro SI2000 Series analyzers.

Features / Benefits / Advantages include:

  • AMC system designed exclusively to support Picarro analyzer operation
  • Simultaneous, continuous flush sequencer module provides very fast sample point scanning cycles
  • Fully user-programmable leak search mode
  • Configurable for 16, 24 or 32 sample ports
  • Recovery from PPM level leak events to normal cleanroom levels in just minutes
  • Optimized performance for Picarro SI2000 analyzers
Download Data Sheet